Mitutoyo TM-500 Series Uživatelský manuál stáhnout pdf (Strana 24)

385

MICROSCOPES

89.5

17.5

20.5

27 27

ø22

95 213.4

308.4

79.6

100

4-M4x0.7

depth 6

C-mount

4-M4x0.7

depth 6

4-M4x0.7

depth 6

ø43

27 27

2741.5

(parfocal length)

152.5

247.5

17.5

20.5 27 27

95 113.5

208.5

95 213.4

308.4

79.6

4-M4x0.7

depth 6

27 27

2741.5

ø22

20.5

116.5 59

ø22

ø35

17.5

ø22

20.5

116.5 60

17.5

ø56 ø56ø45

Unit: mm

VMU

SERIES 378 — Video Microscope Unit

378-505

(Objective is optional.)

Selection Guide of System Configuration

SPECIFICATIONS

Maginification of tube 1X

Applicable 378-505, 378-506 Near-infrared and visible radiation

wavelength 378-507 Near-infrared —visible— near-ul-

traviolet radiation

378-508 Visible and ultraviolet radiation

Objective (Optional)

Reflected illumination • Terecentric system with aperture

stop system

• Fiber-optic illuminator (optional)

is required.

Light source Halogen bulb (21V, 150W) (optional)

Mass 378-505: 570g

378-506: 590g

378-507: 980g

378-508: 1010g

Fiber-optic Illuminator

378-700 (100V AC)

378-700C (110V AC)

378-700A (120V AC)

378-700D (220V AC)

378-700E (240V AC)

•Light source:

Halogen bulb (12V, 100W)

378-505 378-506 378-507 378-508

Dimensions

Order No.

(Depends on each system

configuration)

• Vertical CCD camera mount

lll

• Horizontal CCD camera mount

• YAG laser mount

• Fiber-optic illumination unit

ssss

•M Plan Apo, M Plan Apo SL, G Plan Apo objectives

ssss

for bright field observation

•M Plan Apo NIR, LCD Plan Apo NIR, M Plan Apo NUV

and LCD Plan Apo NUV objectives for laser cutting

•M Plan UV objectives for laser machining

: Provided,

: Available as optional accessory

378-508

378-507

378-506

378-505

The VMU is a compact, light-weight, and easy-to-install

microscope unit for CCD camera monitoring in semiconductor

fabrications.

FEATURES

• The optical system features ultra-long working distance

objectives and correction for the wide range of radiation.

• The fiber-optic reflected illumination keeps the workpiece free

from thermal expansion caused by heat. The fiber-optic

illuminator is required for the light source.

• Also available with a laser mount or revolving nosepiece

(objective mount).

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